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No. 99MBC094A
SERIES No. 544
LSM-500S/501S/503S/
506S/512S/516S
Laser Scan
Micrometer
(Measuring Unit)
User’s Manual
Read this User’s Manual thoroughly
before operating the instrument. After reading,
retain it close at hand for future reference.
[MEMO]
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CONVENTIONS USED IN USER’S MANUAL Mitutoyo manuals use various safety signs. The visual cues and the contents of description appended to each cue are described below. Safety Precautions To ensure that instruments are operated correctly and safely, Mitutoyo manuals use safety signs (Signal Words and Safety Alert Symbols) to identify and warn against hazards and potential accidents. The following signs indicate general warnings: Indicates an imminently hazardous situation which
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CONVENTIONS USED IN USER’S MANUAL Various Types of Notes The following types of notes are provided to help the operator obtain reliable measurement data through correct instrument operation. IMPORTANT • An important note is a type of note that provides information essential to the completion of a task. You cannot disregard this note to complete the task. • An important note is a type of precaution, which if neglected could result in a loss of data, decreased accuracy or instrument
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NOTES FOR EXPORTING Before exporting this product confirm the final purpose of use at the export destination to prevent the product from being used for developing weapons of mass destruction or military affairs. In the case of export to the U.S., this product requires an application for prior approval of CDRH (Center for Devices and Radiological Health) in FDA (Food and Drug Administration). An additional cost generates in application procedure. For detailed information consult a Mitut
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INSTALLATION CONDITIONS The Mitutoyo Laser Scan Micrometer LSM-500H series is an instrument for indoor use. Also, this series is a precision optical instrument and a precision electronic instrument. Therefore, it must be carefully installed and the following conditions must be taken into account to attain the highest possible accuracy. Mitutoyo assumes no liability for any accident or damage caused by use of this instrument not conforming to these conditions. 1. Vibration Install t
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WARRANTY This instrument has been manufactured under rigorous Mitutoyo quality control. Should it malfunction under normal use within one year from the date of original purchase, it will be repaired or replaced, at our option, free of charge. Contact your dealer or the nearest Mitutoyo representative for more information. However, the following damages may be subject to a repair charge even if damage occurs within the warranty period: 1. Unit malfunction or damage arising from impr
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CONTENTS CONVENTIONS USED IN USER’S MANUAL....................................................................................................i NOTES FOR EXPORTING................................................................................................................................iii INSTALLATION CONDITIONS.........................................................................................................................iv WARRANTY.........................................
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4.4.2 Confirming the optical axis with an oscilloscope...........................................................4-5 4.5 Measurement with Two Measuring Units ...................................................................................4-6 4.5.1 DXY type..............................................................................................................................4-6 4.5.2 DF type ........................................................................................
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MEMO viii No. 99MBC094A
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1 INTRODUCTION 1 This chapter describes the maintenance and inspecton of the Laser Scan Micrometer (LSM) measuring unit. 1.1 Outline The Laser Scan Micrometer is a high-precision laser measuring system that performs non-contact dimensional measurements with a high-speed scanning laser beam. With non-contact measurement capability, this system features high-precision measurement of workpieces that are difficult for conventional measuring systems to measure, including hot
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1.3 Inspection and Maintenance This section describes the inspection and maintenance procedures of the measuring unit. 1.3.1 Laser emission display LED The Laser Emission Display LED that is provided on the rear side lights while the laser is being emitted to call the operator’s attention for safety. Do not look the laser beam. Laser emission display LED 1.3.2 Cleaning optical parts To clean the optical parts, turn off the power switch and disconnect the signal cable for saf
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1. INTRODUCTION 1.3.3 Replacing the protective glass and the condenser lens Follow the procedures below to remove the protective glass for replacement or cleaning. To replace the protective glass, first turn off the power switch, then disconnect the signal cable for safety. Model LSM-501S/LSM-503S/LSM-506S/LSM-512S/LSM-516S Removing steps Unscrew the screws that secure the protective glass. Remove the protective glass and the rubber packing. Remounting steps Remount the pro
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MEMO 1-4 No. 99MBC094A
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2 CALIBRATION 2 The accuracy of the instrument has been verified by two-point calibration using two reference gages. High-precision calibration is possible and simple to perform, as mentioned in the User’s Manual attached to the display unit. Calibrate the instrument properly. Types and sizes of the calibration gages are as follows: Model LSM-500S LSM-501SLSM-503S LSM-506S LSM-512S LSM-516S LOW CAL Size φ0.1mm φ 1mm φ 20mm GAGE Type With-holder Stepped HIGH CAL
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2.1 Calibration Gage 2.1.1 With-holder type： The center point of the gage, which is indicated by an arrow ( ), is the calibration point. Set up the gage on the stand so that the laser beam is aligned with the vertical line ( | ) marked on the side of the gage holder. 2.1.2 Straight type： The center point of the marks ( || ) of the gage, which is indicated by an arrow ( ), is the calibration point. Set up the gage on the stand so that the mark ( | ) on the end face of the gage
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3 SPECIFICATIONS OF MEASURING UNIT 3 This chapter gives the specifications of the following models. Model Measuring range Code No. LSM-500S φ 0.005mm to φ 2mm 544-532 LSM-501S φ 0.05mm to φ 10mm 544-534 LSM-503S 544-536 φ 0.3mm to φ 30mm LSM-506S φ 1mm to φ 60mm 544-538 LSM-512S 544-540 φ 1mm to φ 120mm LSM-516S φ 1mm to φ 160mm 544-542 3-1 No. 99MBC094A
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3.1LSM-500S （1）Specifications LSM-500S MODEL Order No. 544-532 LSM-6200 Applicable display unit Up to 12.5(.49”) Laser scanning range mm(inch) (Detecting regions is limited to about 10 mm (.4”) approx.) 0.005 to 2 (.0002” to .08”) mm(inch) Measuring range 0.1 to 2 (.004” to .08”)[*1] µm(inch) 0.01 to 10 (.000001” to .0005”) [Selectable] Resolution Repeatability[*2] µm(inch) ±0.03 (±.0000012”) [*3] Linearity [*2] µm(inch) ±0.3 (±.000012”) [*4] Positional error [*2][*5]
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3. SPECIFICATIONS OF MEASURING UNIT （4）External dimensions Unit：mm (inch) 【Mass】 Measuring unit ： 1.0 kg Signal cable ： 0.5 kg 3-3 No. 99MBC094A
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3.2LSM-501S （1）Specifications MODEL LSM-501S Order No. 544-534 Applicable display unit LSM-6200 Laser scanning range mm(inch) Up to 19 (.74”) Measuring range mm(inch) 0.05 to 10 (.002” to .4”) Resolution µm(inch) 0.01 to 10 (.000001” to .0005) [Selectable] Repeatability [*1] µm(inch) ±0.04 (±.0000016”)[*2] Whole range µm(inch) ±0.5 (±.00002”)[*3] Linearity µm ±( 0.3 + 0.1 ΔD ) Narrow measuring [*1] [*3][*4] range inch ±( .000012” + .000004” ΔD ) Positional error [*1][*5]
