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Varian Vacuum Technologies
121 Hartwell Avenue
Lexington, MA 02421
(781)861-7200
HS-20
Diffusion Pump
Instruction Manual
Manual No. 6999-01-120
Revision G
October 2000
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Sales and Service Offices America France Netherlands Varian Vacuum Technologies Varian s.a. Varian Vacuum Technologies 121 Hartwell Avenue 7 avenue des Tropiques Rijksstraatweg 269 H, Lexington, MA 02421, Z.A. de Courtaboeuf – B.P. 12 3956 CP Leersum USA Les Ulis cedex (Orsay) 91941 The Netherlands Tel: (781) 861 7200 France Tel: (31) 343 469910 Fax: (781) 860 5437 Tel: (33) 1 69 86 38 38 Fax: (31) 343 469961 Toll Free: 1 (800) 882 7426 Fax: (33) 1 69 28 23 08 Mexico Argentina Germany Vari
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Telephone Numbers For technical support and service within the continental United States, Alaska and Hawaii: Continental U.S. only – 1-800-8-VARIAN (1-800-882-7426) Order Entry (Sales) ..............................................................................Press 1 Technical Support and Field Service....................................................Press 2 Training (Information and Registration).........................................Press 3 or 4 Hawaii and Alaska – (781)861-7200 Sales,
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Warranty Products manufactured by Seller are warranted against defects in materials and workmanship for twelve (12) months from date of shipment thereof to Customer, and Seller’s liability under valid war- ranty claims is limited, at the option of Seller, to repair, replacement, or refund of an equitable portion of the purchase price of the Product. Items expendable in normal use are not covered by this warranty. All warranty replacement or repair of parts shall be limited to equipment malfunct
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OPERATION AND MAINTENANCE OF THIS EQUIPMENT INVOLVES SERIOUS RISK. IT IS THE RESPONSIBILITY OF THE USER TO MAINTAIN SAFE OPERATING CONDITIONS AT ALL TIMES. VARIAN ASSUMES NO LIABILITY FOR PERSONAL INJURY OR DAMAGE RESULTING FROM OPERATION OR SERVICE OF THE EQUIPMENT. Carelessly or improperly operated equipment can cause serious injury or death and/or damage to the equipment. The emergency and safety procedures in this manual are provided to help users and qualified persons to operate and service
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SAFE INCORPORATION OF VARIAN DIFFUSION PUMPS INTO VACUUM SYSTEMS IS THE RESPONSIBILITY OF THE SYSTEMS DESIGNER. TAKE APPROPRIATE ACTION THROUGH REDUNDANCY, AND/OR OTHER SAFEGUARDS TO PROTECT PERSONNEL AND PROPERTY FROM THE HAZARDS DESCRIBED BELOW AND IN THE INSTALLATION, OPERATION, AND MAINTENANCE INSTRUCTION MANUAL. SAFE OPERATION IS THE RESPONSIBILITY OF THE USING ORGANIZATION AND ITS PERSONNEL. READ THE INSTRUCTION MANUAL AND UNDERSTAND HOW TO AVOID HAZARDS PRIOR TO OPERATING THE DIFFUSION PU
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THE INSTALLATION, OPERATION, AND/OR SERVICING OR DIFFUSION PUMPS INVOLVES ONE OR MORE OF THE FOLLOWING HAZARDS, ANY ONE OF WHICH, IN THE ABSENCE OF SAFE OPERATING PRACTICES AND PRECAUTIONS, COULD POTENTIALLY RESULT IN DEATH OR SERIOUS HARM TO PERSONNEL. Hazard Suggested Corrective Action Loss of utility: water and/or electricity Provide sufficient backup water and power supply as neces- sary to effect a safe shutdown under worst case conditions. Overpressure in foreline Provide an interlock to e
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Hazard Suggested Corrective Action a. Explosion – Operation of the diffusion pump without prior and continuous evacuation (below 0.5 Torr (66.5 Pa)) or coolant and introducing a strong oxidizer (such as air) or explosive vapors or powders or materials which may react with pumping fluids into a hot (above 300°F or 150°C) pump can cause an explosion. Such an explosion can violently expel valves and other hardware, slam open doors that are not designed for appropriate pressure relief, or burst othe
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Prohibited Action Explosion-Causing Condition Contaminate pump with explosive vapors, Lower explosive threshold of gas mixtures powders, or reactive materials Remove, defeat, or override safety counter- Overtemperature, overpressure, more measures such as pressure and thermal combustible mixtures switches and valve sequencer interlocks Machine or weld without removing all oil Source of ignition or solvent residue in pump Use unsuitable pumping fluid especially Lower explosive threshold of gas m
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d. Poisonous and/or Corrosive Compounds – When pumping poisonous, reactive, and/or corro- sive gas, vapors, or chemicals, even proper operation and regeneration will not always ensure that all hazardous materials have been totally removed. If hazardous gas, vapors, chemicals, or combustible mixtures are pumped, sufficient quantities may exist during operation or remain after regeneration to cause severe injury or death. Overheating the pump oil, exposing it to air or reac- tive materials, or ov
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i. Cold Coolant – Liquid nitrogen, a cryogenic liquid, is used in traps. If it is splashed on body tis- sues or eyes, it can cause severe frostbite or blindness. The extremely low temperature of lique- fied nitrogen can cause skin damage similar to high temperature burns. Contact with the cold gas evolving from the liquid may produce the same effect. Delicate tissues, such as the eye tissues, are most easily damaged by exposure to cold gas or liquid. To minimize the risk of hazardous con- tact o
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WARNING _____________ High voltages (up to 480 V) can kill. Always break the primary circuit to the power supply before starting to work on the heater and/or its wiring. WARNING _____________ Diffusion pumps are typically cleaned with acetone, alcohol, or other solvents. When heated, sprayed or exposed to high temperature equipment, these solvents become flammable and explosive, causing serious injury or death. Do Not Use Near A High-Temperature Source. Ventilate working area with a blower and u
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WARNING _____________ If hazardous gas, vapors, chemicals, or combustible mixtures are pumped, sufficient quantities may exist during operation. This pump may contain decomposed and/or overheated pump oils or poisonous and/or corrosive process materials which are highly toxic and also can be an asphyxiant. Proper operation will not always ensure that all haz- ardous materials have been removed. WARNING _____________ Hot oils can cause serious burns. Wear protective gloves and long sleeved, loose
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Table of Contents Section Page Safety Considerations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . i Section I – Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1 1-1 General . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1 1-2 Operating Specifications . . . . . . . . . .
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List of Illustrations Figure Title Page 1-1 Speed and Throughput Curves – HS-20 Diffusion Pump . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2 1-2 Outline Drawing – HS-20 Diffusion Pump . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3 1-3 Cooling Water Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7 1-4 200/240/400/430/440/480 V Wiring Diagram – HS-20 Diffusion Pump . . . . . . . . . . . . .
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SECTION I INSTALLATION 1-1 GENERAL Upon receipt, inspect the container for evidence of damage in shipment. Do not discard any evidence of rough handling. Factory packing provides for maximum protection during shipment. However, the pump should be inspected immediately and any damage should be reported to the carrier without delay. Before unpacking and installing the pump, the user should thoroughly familiarize himself with the contents of this instruction manual, particularly the physical and op
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Installation Figure 1-1. Speed and Throughput Curves – HS-20 Diffusion Pump 1-3 PHYSICAL SPECIFICATIONS (See Figure 1-2) Flange dimensions (inches): ASA ISO 630k ISO 160k Inlet Foreline Inlet Foreline OD 27.50 9.0 27.17 7.09 ID 21.25 5.06 21.25 5.06 Thickness 1.12 0.75 0.78 0.47 Bolt Circle 25.0 7.5 No. of Holes 20.0 8.0 Requires NW-630 Requires NW-160 Size of Holes 1.25 0.75 Centering Ring (not Centering Ring (not Orientation Straddle center line included with pump) included with pump) Gasket G
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Installation Figure 1-2. Outline Drawing – HS-20 Diffusion Pump, with ASA Flanges 1-3
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Installation 1-4 UNPACKING Pumps are factory-packaged to permit prolonged storage in suitably protected areas without special precautions. WARNING _____________ When lifting some Varian diffusion pumps, use power-assisted equip- ment and trained moving/installation personnel to avoid dropping, slip- ping, and/or overturning the pump and severely injuring personnel. check weight of equipment before lifting and do not stand under equip- ment being moved. a. Remove flange covers, blank plugs, prote
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Installation WARNING _____________ Diffusion pumps are typically cleaned with acetone, alcohol, or other solvents. When heated, sprayed or exposed to high temperature equipment, these solvents become flammable and explosive, causing serious injury or death. Do not use near high temperature source. Ventilate work- ing area with a blower and use in large, well-ventilated room. When heated or sprayed, acetone or alcohol also becomes 4 to 5 times heav- ier than air and will flow down, settling in ta
