ページ1に含まれる内容の要旨
SQM-160
Rate/Thickness Monitor
User’s Guide
Version 2.0
© Copyright Sigma Instruments, Inc. 2000
Sigma
instruments
S S
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Safety Information Read this manual before installing, operating, or servicing this equipment. Do not install substitute parts, or perform any unauthorized modification of the product. Return the product to Sigma Instruments for service and repair to ensure that safety features are maintained. Safety Symbols WARNING: Calls attention to a procedure, practice, or condition, that could possibly cause bodily injury or death. CAUTION: Calls attention to a procedure, practice, or condition, that cou
ページ3に含まれる内容の要旨
Warranty Information This Sigma Instruments product is warranted against defects in material and workmanship for a period of 1 year from the date of shipment, when used in accordance with the instructions in this manual. During the warranty period, Sigma Instruments will, at its option, either repair or replace products that prove to be defective. Limitation of Warranty Defects from, or repairs necessitated by, misuse or alteration of the product, or any cause other than defective materials or
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Table of Contents Chapter 1 Quick Start 1.0 Introduction ..................................................................................................................1-1 1.1 Installation.....................................................................................................................1-4 1.2 Front Panel...................................................................................................................1-1 1.3 Rear Panel....................................
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Chapter 5 Maintenance 5.0 Introduction...................................................................................................................5-1 5.1 Fuse Replacement ......................................................................................................5-1 Appendix A. Material Parameters B. Specifications C. I/O Connections D. Declaration of Conformity
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Chapter 1 Quick Start 1.0 Introduction Congratulations on your purchase of the SQM-160 Deposition Rate/Thickness Monitor. The SQM-160 is an easy-to-use instrument for measuring many types of thin film coatings. This chapter will help to get you up and running quickly. Please review the entire manual for detailed operational, programming, and safety information. 1.1 Installation Refer to Sections 1.3 and 1.4 for detailed system hookup information. Rack The SQM-160 occupies a 3.5” high, half-r
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Chapter 1 Quick Start 1.2 Front Panel Display1 Display2 Crystal Status LEDs Control Knob Rate A/s Thickness kA 1 2 3 4 5 6 Zero Crystal Status Open Time SP Time Closed Thk SP Next Prev Clear Clear Program Xtal Life Shutter Final Thk SQM-160 Sigma Control Configuration instruments Rate/Thickness Monitor Σ Setpoint LEDs Configuration Section Control Section Front Panel Controls Display 1 Displays rate and thickness in normal operation. Displays setup parameter name in program mode. Display 2 Dis
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220 Chapter 1 Quick Start 1.3 Rear Panel Ground Option A Card Option B Card 0 1 Rate Thick 3 4 5 6 Sensor 1 Sensor 2 RS-232 Relay I/O Line Fuse Fuse 1/2 A SB at 120VAC Manufactured By Fuse 1/4 A SB at 240VAC Model No. SQM-160 Sigma Ser No. 80901 Σ instruments Rear Panel Connections Sensor 1 & 2 Connection to quartz crystal sensor remote oscillator. See Section 1.4 for detailed hookup. RS-232 Connection to computer serial port for programming and data acquisition. Relay I/O Connects
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220 Chapter 1 Quick Start 1.4 System Connections The diagram and table below identifies typical vacuum system components and their function. Sensor Ground Wire Option A Card Option B Card Ground 0 1 In-Vac Sensor 1 Sensor 2 RS-232 Relay I/O Line Fuse Cable Source Fuse 1/2 A SB at 120VAC Manufactured By Model No. SQM-160 Fuse 1/4 A SB at 240VAC Sigma Ser No. 80901 Shutter Σ instruments Feedthrough 6" BNC Cable Oscillator 10' BNC Cable System Components Sensor Holds the quartz crystal u
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Chapter 1 Quick Start 1.5 Film Setup This section will help you setup the SQM-160 to measure a film. Refer to Chapter 2 for detailed film programming instructions. Note: User actions with front panel controls are indicated by a Box. Results shown on displays, are indicated by a Dashed Box. Enter Program If the Crystal Life display is shown, press Xtal Life to return to Mode Rate/Thickness mode. Press Program to enter the film setup menu. Pressing the program switch while in program mode re
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Chapter 1 Quick Start 1.6 Depositing a Film If you have followed this Quick Start chapter, you are ready to deposit a film. Follow the procedure below to begin deposition. Verify Sensor Verify that the Crystal Status LED for the measuring sensor is Operation lit, and not flashing. Display Display 1 should be displaying Rate on the left and Thickness Rate/Thickness on the right. If the Crystal Life display mode is active, press the Xtal Life switch to return to Rate/Thickness mode. If the Pro
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Chapter 2 Operation 2.0 Introduction This section details the operation of the SQM-160 menus and front panel controls. It is arranged by common user tasks. Note: User actions with front panel controls are indicated by a Box. Results shown on displays, are indicated by a Dashed Box. 2.1 Menu Selection Two menus provide control of the SQM-160 programming. The Film Parameters Menu allows you to customize each of the nine stored films. The System Parameters Menu sets values that remain consta
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Chapter 2 Operation 2.2 Film Parameters Setup The Film Parameters Menu programs the SQM-160 for the materials that will be deposited as thin films. Nine films can be stored, but only one film is active at any time. To program film parameters: 1. Press Program to enter program mode. 2. Use the Control Knob to scroll to the desired Film # (1-9). 3. Depress the Control Knob or Next to enter the film parameters menu for the selected film. 4. Use Next and Prev to move through the film param
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Chapter 2 Operation The diagram and table below detail the parameters available in the Film Parameters Menu: Film Selection Film Parameters Menu Sub-Menu Film1 - DENSITY . - TOOLING Program . - Z-FACTOR . - FINL THK . - 1 . - THK SET - 2 . - TIME SET Sensors 3 to 6 - 3 Film9 - SENS AVG show only if the . four sensor . option card is iinstalled. - 6 Display Description Range Default Units DENSITY Density of the material being 0.5 – 99.99 1.00 gm/cc deposited.
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Chapter 2 Operation 2.3 System Parameters Setup The System Parameters Menu sets values that pertain to the overall functioning of the SQM-160, and to your vacuum system’s setup. System parameters are constant for all films. 1. Press Program to enter program mode. 2. Press Prev to enter the System Parameters Menu 3. Use Next and Prev to move through the system parameters. 4. Use the Control Knob to adjust the parameter value shown in Display2 to the desired setting. 5. Press Clear to
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Chapter 2 Operation System Parameters Menu Sub-Menu - TIMEBASE - xTLTOOL1 - SIM MODE - xTLTOOL2 - FRQ DISP - xTLTOOL3 . - RATE RES Program Prev . - RATEFILT - BAUDRATE - xTLTOOL6 - ETCH - xTOOLING - FREQ MIN - FMIN/MAX - FREQ MAX - R/T BNDS - RATE MIN - RATE MAX - THICKMIN Display Description Range Default Units TIMEBASE Time required to take a single 0.15 – 2.00 0.25 sec measurement SIM MODE Simulates sensors. On/Off Off FRQ DISP Toggles between Rate/Thickness On/Off Off
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Chapter 2 Operation Display Description Range Default Units xTOOLING Tooling value assigned to each 10 – 399 100 % sensor. See the Sensor Tooling section of this chapter for information on setting tooling values. FMIN/MAX Sub-Menu to select Crystal Frequency Limits FREQ MIN Minimum Crystal Frequency 4.00 – 6.00 5.00 MHz FREQ MAX Maximum Crystal Frequency 4.10 – 6.10 6.10 MHz The following System Parameters apply only if the optional Analog Output card is installed. See the Options chapter for
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Chapter 2 Operation 2.4 Sensor Selection The SQM-160 comes standard with two sensor inputs. Four additional sensors are available by adding a Sensor Option Card. The sensors can each be assigned to a different film, or multiple sensors can be averaged for a single film. The averaging option provides more uniform coverage of the deposition area, and provides a backup sensor capability. If one of multiple sensors assigned to a film fails, the sensor is automatically removed from rate/thickne
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Chapter 2 Operation 2.5 Sensor Min/Max Frequency The Sensor Min/Max frequencies establish the operating range for the sensing quartz crystals. Both values are used to determine the % life that is displayed in Xtal Life mode. When the sensor frequency drops below the minimum, the SQM-160 indicates a sensor failure by blinking the Crystal Status display. Likewise, a sensor whose initial value exceeds the maximum will cause a blinking Crystal Status. To set sensor minimum and maximum frequencies
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Chapter 2 Operation 2.6 Sensor Tooling Sensor Tooling adjusts for the difference in deposition rate between the sensor and the substrate being coated. It is an empirically determined value that matches the sensor readings to your vacuum system. Substrate Substrate Tooling Tooling Over 100% Under 100% The first Tooling is set in the Film Parameters Menu and is applied to the averaged Rate and Thickness for all sensors assigned to that film. Film Tooling is a film specific value. The second Too
