ページ1に含まれる内容の要旨
SQC-122c
Thin Film Deposition Controller
User’s Guide
Version 2.0
© Copyright Sigma Instruments, Inc. 1999 - 2002
Sigma
instruments
ページ2に含まれる内容の要旨
Safety Information Read this manual before installing, operating, or servicing equipment. Do not install substitute parts, or perform any unauthorized modification of the product. Return the product to Sigma Instruments for service and repair to ensure that safety features are maintained. Safety Symbols WARNING: Calls attention to a procedure, practice, or condition that could possibly cause bodily injury or death. CAUTION: Calls attention to a procedure, practice, or condition that could poss
ページ3に含まれる内容の要旨
Warranty Information This Sigma Instruments product is warranted against defects in material and workmanship for a period of 1 year from the date of shipment, when used in accordance with the instructions in this manual. During the warranty period, Sigma Instruments will, at its option, either repair or replace products that prove to be defective. Limitation of Warranty Defects from, or repairs necessitated by, misuse or alteration of the product, or any cause other than defective materials or
ページ4に含まれる内容の要旨
Table of Contents Chapter 1 Quick Start 1.0 Introduction................................................................................................1-1 1.1 Thin Film Process Overview........................................................................1-1 1.2 System Connections...................................................................................1-2 1.3 Front Panel................................................................................................1-3 1.4 Rear
ページ5に含まれる内容の要旨
Appendix A. Material Parameters B. Specifications C. I/O Connections D. Handheld Remote Controller E. Declaration of Conformity
ページ6に含まれる内容の要旨
Chapter 1 Quick Start 1.0 Introduction The SQC-122c is a multi-channel quartz crystal monitor and deposition controller. It measures up to six 1MHz to 6 MHz quartz crystal sensors, and controls two evaporation sources. Twenty-five processes, consisting of 250 layers and 25 materials, can be stored for easy retrieval. Eight process control relays, and eight digital inputs are easily configured to support a broad range of external functions, including source pocket rotation. The SQC-122c can a
ページ7に含まれる内容の要旨
Chapter 1 Quick Start 1.2 Front Panel SoftKeys Control Knob Remote Jack Front Panel Controls SoftKeys Provide access to instrument operations and setup menus. The functions of the SoftKeys change to adapt to different operations and are displayed on the left of the screen. Control Used to adjust values and select menu items. Pushing the Knob control knob stores the current setting and moves to the next. Remote Connection jack for the optional handheld remote control Jack module. See
ページ8に含まれる内容の要旨
Chapter 1 Quick Start 1.3 Rear Panel Manufactured By SQC-122c Deposition Controller Sigma Serial No. 100-120/200-240 V~ ? instruments 50/60 Hz 25 VA Sensor 3 Sensor 4 Output 3 Output 4 I/O 9-16 I/O 1-8 Sensor 1 Sensor 2 Output 1 Output 2 Fuse T.5A 250V RS-232 Rear Panel Connections Sensor 1 & 2 Connects to quartz crystal sensor remote oscillator. Output 1 & 2 Connects the SQC-122c output to your evaporation supply control input. I/O (1-8) Connects 8 relays and 8 digital inputs to external equip
ページ9に含まれる内容の要旨
Chapter 1 Quick Start 1.4 System Connections Sensor In-Vac Cable Source Shutter Feedthrough Evaporation Supply BNC Cables 6" BNC Cable Output Control Input Oscillator Ground Wire This section identifies typical system components and their connection: System Components Sensor Holds the quartz crystal used to measure rate and thickness. Crystals must be replaced occasionally. In-Vac Cable A coaxial cable that connects the sensor to the feedthrough. Feedthrough Provides isolation between vacuum a
ページ10に含まれる内容の要旨
Chapter 1 Quick Start 1.5 Installation WARNING: Care should be exercised to route SQC-122c cables as far as practical from other cables that carry high voltages or generate noise. This includes other line voltage cables, wires to heaters that are SCR-controlled, and cables to source power supplies that may conduct high transient currents during arc down conditions. Rack The SQC-122c occupies a 5.25” high, half-rack space. An Installation optional installation kit is available to adapt to a fu
ページ11に含まれる内容の要旨
Chapter 1 Quick Start 1.6 Process Setup Follow these steps to build a process from the main (also called “power up”) screen. Note: If you are prompted for a password, use the switches along the left of the screen to enter the password. The top switch is “1”, the bottom switch is “6”. If you forget the password, see the System Parameters section for password setup. Power Move the rear panel power switch to the On (|) position. The On SQC-122c will briefly display its initialization informati
ページ12に含まれる内容の要旨
Chapter 1 Quick Start Edit Mode To edit a setting in any menu, turn the control knob to scroll to the desired setting, then press the Edit SoftKey. In Edit mode, the cursor moves to the setting value and the SoftKey functions change to show: Next: Store the parameter and move to next parameter for editing. Cancel: Stop editing and return the selected parameter to its previous value. Enter: Stop editing and save values for selected parameter. In Edit mode, adjust the control knob to set the desir
ページ13に含まれる内容の要旨
Chapter 1 Quick Start 1.7 Depositing a Film If you have followed this Quick Start chapter, you are ready to deposit a film. Note: You can simulate the steps below, without actually depositing a film, by going to the System Parameters Menu and selecting Simulate Mode ON. Simulate mode is useful for testing processes before applying power to the evaporation supply. See Section 3.6 for System Parameters Menu information. Verify Output From the Main Menu, press the Next Menu SoftKey. Then, Oper
ページ14に含まれる内容の要旨
Chapter 1 Quick Start This page left blank for your notes. 1-9
ページ15に含まれる内容の要旨
Chapter 2 Operation 2.0 Introduction This chapter describes common tasks associated with operating the SQC-122c. It assumes that you understand basic operation of the menus and parameter setup as described in Chapter 1. Detailed definitions of unfamiliar setup parameters can be found under the appropriate menu description in Chapter 3. 2.1 Definitions Several terms will be used repeatedly throughout this manual. It is important that you understand each of these terms. Material: A physical
ページ16に含まれる内容の要旨
Chapter 2 Operation The most commonly modified parameters are shown on the first film parameters screen. Additional parameters can be accessed by pressing Film Conds (film conditioning) or Deposit Controls. THICKNESS(kA) RATE(A/s) POWER(%) Exit to 0.000 0.0 0.0 Main My Process 1 Editing: Aluminum Parameter Value Units Prev Menu P Term 50 None I Term 0.7 Sec. Edit D Term 0.0 Sec. Sensor 1 On On/Off Sensor 2 On On/Off Film Film Tooling 100 % Conds. Output Out1 Out1/Out2 Deposit Pocket
ページ17に含まれる内容の要旨
Chapter 2 Operation The PID parameters control the response of the SQC-122c to changes in deposition rate. These values are unique to each deposition chamber setup, and to a lesser extent to each material. The P Term is proportional (or gain), the % process rate change divided by the % input power change. The I Term (integral) sums the rate deviations over time to more accurately achieve the rate setpoint. The D Term (derivative) speeds response to sudden changes in rate. Volumes have been
ページ18に含まれる内容の要旨
Chapter 2 Operation From the Film Conds menu, press Prev Menu to return to the main Film Params menu. Now press Deposit Controls. The Deposit Controls menu contains parameters that modify operation during the deposition phase. THICKNESS(kA) RATE(A/s) POWER(%) Exit to 0.000 0.0 0.0 Main Current: Process 1 EDITING: Film 1 Parameter Value Units Prev Menu Shutter Delay h:mm:ss 0:01:00 Capture 20.0 % Control Error (Ignore, Stop, Hold) Edit Setting Hold Error 18.0 % Rate Sampling (Cont,Tim
ページ19に含まれる内容の要旨
Chapter 2 Operation 2.3 Defining a Process A process is a sequence of film layers deposited to achieve a particular thin film characteristic. A few processes, each consisting of a few layers, may be adequate for a production facility. For research or laboratory use, the SQC-122c can store up to 25 processes to a total of 250 layers. You should define each of the films that will make up the layers of the process before starting process definition. See the previous section for instructions o
ページ20に含まれる内容の要旨
Chapter 2 Operation Initial Rate and Final Thickness are the main process setpoints for this layer of material. Keep in mind that the SQC-122c zeroes thickness at the beginning of each layer. It is not a cumulative value. Time Setpoint and Thickness Limit are arbitrary values that will activate a relay when they are reached. Start mode allows you to have this layer start immediately on completion of the previous layer, Auto mode. Manual mode waits for a user signal via the front panel, RS-23
