ページ1に含まれる内容の要旨
TELEDYNE
HASTINGS
INSTRUMENTS
INSTRUCTION MANUAL
HFM-301/305/306
FLOW METERS
HFC-303/307 FLOW
CONTROLLERS
ISO 9001
CER T IFIED
ページ2に含まれる内容の要旨
Manual Print History The print history shown below lists the printing dates of all revisions and addenda created for this manual. The revision level letter increases alphabetically as the manual undergoes subsequent updates. Addenda, which are released between revisions, contain important change information that the user should incorporate immediately into the manual. Addenda are numbered sequentially. When a new revision is created, all addenda associated with the previous revision of the
ページ3に含まれる内容の要旨
Table of Contents 1. GENERAL INFORMATION............................................................................................................................................ 4 1.1. FEATURES.................................................................................................................................................................... 4 1.2. SPECIFICATIONS.................................................................................................................
ページ4に含まれる内容の要旨
1. General Information The Hastings 300 Series high range mass flow meters are designed to accurately measure mass flow at a range between 25 slm and 10000 slm. The Hastings 300 Series high range mass flow controllers are designed to accurately measure and control mass flow at a range between 25 slm and 2500 slm. These instruments are intrinsically linear and have an accuracy of better than ±1% F.S. (full scale). Hastings mass flow instruments do not require any periodic maintenance under n
ページ5に含まれる内容の要旨
1.2. Specifications Accuracy..........................................................HFM-301/305 & HFC-303/307: ±1% full scale (F.S.) ...........................................................................................................HFM-306; ±3% full scale (F.S.) Repeatability ................................................................................................................ ±0.07% of F.S. Maximum pressure.................................................................
ページ6に含まれる内容の要旨
1.3. Optional 4-20 mA Current Output An option to the standard 0 - 5 VDC output is the 4 - 20 mA current output that is proportional to flow. The 4 - 20 mA signal is produced from the 0 - 5 VDC output of the flow meter. The current loop output is useful for remote applications where pickup noise could substantially affect the stability of the voltage output. The current loop signal replaces the voltage output on pin 6 of the “D” connector. The load must be less than 600 Ω. Failure to m
ページ7に含まれる内容の要旨
2. Operation This section contains the necessary steps to assist in getting a new flow meter/controller into operation as quickly and easily as possible. Please read the following thoroughly before attempting to install the instrument. 2.1. Receiving Inspection Carefully unpack the Hastings 300 Series instrument and any accessories that have also been ordered. Inspect for any obvious signs of damage to the shipment. Immediately advise the carrier who delivered the shipment if any damag
ページ8に含まれる内容の要旨
sulfur hexafluoride) or at high pressures (> 250 psig) the instrument must be installed horizontally. When mounted in a different orientation the instrument should be re-zeroed at zero flow with the system pressurized to the expected operating pressure. One of the smallest of the internal passageways in the 300 Series is the diameter of the sensor tube, which can be 0.026” (0.66 mm), 0.017” (0.43mm), or 0.014” (0.36mm), so the instrument requires adequate filtering of the gas supply to pre
ページ9に含まれる内容の要旨
Figure 2-1 Table 2-1 “H” Pin-out Pin # 1 Do not use 2 Do not use 3 Do not use 4 Do not use 5 Signal Common 6 Output 0-5 VDC (4-20mA) 7 Case Ground 8 Valve Override 9 -15 VDC 10 Do not use 11 +15 VDC 12 Signal Common 13 External Input 14 Set Point 0-5 VDC (4-20mA) 15 Do not use Manual: 152-082010 301-305-306_303-307 Series Page 9 of 35
ページ10に含まれる内容の要旨
Figure 2-2 Table 2-2 “U” Pin-out Pin # 1 Signal Common 2 Do not use 3 Do not use 4 +15 VDC 5 6 Output 0-5 VDC (4-20mA) 7 Signal Common 8 Case Ground 9 Valve Override 10 11 -15 VDC 12 External Input 13 Signal Common 14 Signal Common 15 Set Point 0-5 VDC (4-20mA) Manual: 152-082010 301-305-306_303-307 Series Page 10 of 35
ページ11に含まれる内容の要旨
Ground +15 VDC −15 VDC Common 0−600 Ohms 2.6. 4 – 20 mA Connections The 300 Series flow meters have a 4 - 20 mA current output option available as an alternative to the standard 0 - 5 VDC output. This current output is useful for remote applications where noise pick-up could substantially affect the stability of the voltage output. The 4 - 20 mA signal is produced from the 0 - 5 VDC output of the flow meter and replaces the voltage output on pin 6 of the “D” connector. The current is so
ページ12に含まれる内容の要旨
2.7. Operation The standard instrument output is a 0 - 5 VDC and the signal is proportional to the flow i.e., 0 volts = zero flow and 5 volts = 100% of rated flow. The 4 - 20 mA option is also proportional to flow, 4 mA = zero flow and 20 mA = 100% of rated flow. 2.7.1. Operating Conditions For proper operation, the combination of ambient temperature and gas temperature must be such that the flow meter temperature remains between 0 and 60°C. Most accurate measurement of flow will be obt
ページ13に含まれる内容の要旨
Span Error -vs- Pressure for 0.014" Sensors 3% 2% 1% 0% -1% Mean Max Min -2% -3% 0 100 200 300 400 500 600 700 800 900 1000 Pressure (psig) Figure 2-4 Span Error -vs- Pressure for 0.017" Sensors 5% 4% 3% 2% 1% 0% Mean Max Min -1% -2% 0 100 200 300 400 500 600 700 800 900 1000 Pressure (psig) Figure 2-5 Manual: 152-082010 301-305-306_303-307 Series Page 13 of 35 Error s hift (% reading) Error s hift (% reading)
ページ14に含まれる内容の要旨
Span Error vs Pressure for 0.026" Sensor 2.0% 0.0% -2.0% -4.0% -6.0% -8.0% -10.0% -12.0% -14.0% -16.0% -18.0% -20.0% 0 100 200 300 400 500 600 700 800 900 1000 Pressure(psig) Figure 2-6 Manual: 152-082010 301-305-306_303-307 Series Page 14 of 35 Span Error (% reading)
ページ15に含まれる内容の要旨
Span Error vs Pressure 1.0% 0.8% 0.6% 0.4% 0.2% 0.0% -0.2% Mean error max -0.4% min -0.6% -0.8% -1.0% 0 50 100 150 200 250 300 Pressure(psig) Figure 2-7 2.7.4. Blending of Gases In the blending of two gases, it is possible to maintain a fixed ratio of one gas to another. In this case, the output of one flow controller is used as the reference voltage for the set point potentiometer of a second flow controller. The set point potentiometer then provides a control signal that is proportio
ページ16に含まれる内容の要旨
2.8. Range Changing Changing the range of a flow controller can be done in the field, but calibration is required. It is recommended however, that the unit be sent back to the factory along with the new range desired, gas and operating parameters. Consult factory for more information. 2.9. Output Filter The flow output signal may have noise superimposed on the mean voltage levels. This noise may be due to high turbulence in the flow stream that the fast sensor is measuring or it could
ページ17に含まれる内容の要旨
of the flow meter signal to within ± 0.001 Volts of the command signal. The command signal will not match the flow signal if there is insufficient gas pressure to generate the desired flow. If the command signal exceeds 5 Volts the controller will continue to increase the flow until the output matches the command signal. However, the flow output may not maintain the published accuracy values under these conditions. If the command signal is less than 1% of full scale (0.05 Volts or 4.16 m
ページ18に含まれる内容の要旨
2.14. Temperature Coefficients As the temperature of the instrument changes from the calibration temperature, errors will be introduced into the output of the instrument. The Temperature Coefficient of Zero describes the change in the output that is seen at zero flow. This error is added in to the overall output signal regardless of Span error -vs- Temperature 1.4% 1.2% 2 y = 5E-06x - 9E-05x - 0.0007 1.0% 0.8% 0.6% 0.4% 0.2% 0.0% 0 10203040506070 -0.2% Temperature (°C) Figure 2-10 flo
ページ19に含まれる内容の要旨
3. Theory and Function 3.1. Overall Functional Description The 300 Series flow meters consist of a sensor, base, shunt, control valve (303/307) and electronic circuitry. The sensor is configured to measure gas flow rate from 25-10000 slm, depending on the customer’s desired overall flow rate. The shunt divides the overall gas flow such that the flow through the sensor is a precise percentage of the flow through the shunt. The flow through both the sensor and shunt is laminar. The contr
ページ20に含まれる内容の要旨
conducted from the upstream and downstream coils to the foam insulation surrounding them is assumed to be equal, based on the symmetry of the sensor construction. Since the sensor tube inlet and outlet are linked by an aluminum ambient bar, the high thermal conductivity of the bar provides a ‘thermal short’, constraining the ends of the sensor tube to be at equal surface temperature. Moreover, the tube ends and the aluminum ambient bar have intimate thermal communication with the main fl