ページ1に含まれる内容の要旨
User’s Guide
Shop online at
www.omega.com
e-mail: info@omega.com
FMA 1400 and FMA 1500
Mass Flow Meters and Controllers
ページ2に含まれる内容の要旨
® OMEGAnet Online Service Internet e-mail www.omega.com info@omega.com Servicing North America: USA: One Omega Drive, Box 4047 ISO 9001 Certified Stamford CT 06907-0047 Tel: (203) 359-1660 FAX: (203) 359-7700 e-mail: info@omega.com Canada: 976 Bergar Laval (Quebec) H7L 5A1 Tel: (514) 856-6928 FAX: (514) 856-6886 e-mail: info@omega.ca For immediate technical or application assistance: ® USA and Canada: Sales Service: 1-800-826-6342 / 1-800-TC-OMEGA ® Customer Service: 1-800-622-2378 / 1-800-622-B
ページ3に含まれる内容の要旨
TABLE OF CONTENTS 1. UNPACKING THE FMA 1400/1500 MASS FLOW METER................ 1 1.1 Inspect Package for External Damage......................................... 1 1.2 Unpack the Mass Flow Meter/Controller....................................... 1 1 1.3 Returning Merchandise for Repair............................................... 2. INSTALLATION............................................................ 1 2.1 Primary Gas Connections............................................................
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7.3 Linearity Adjustment...................................................................... 16 7.3.1 Connections and Initial Warm Up........................................... 16 7.3.2 ZERO Adjustment.................................................................17 7.3.3 25% Flow Adjustment............................................................. 17 7.3.4 50% Flow Adjustment............................................................ 17 7.3.5 75% Flow Adjustment.........................
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TRADEMARKS ® Omega -is a registered trademark of Omega Engineering, Inc. Buna7 is a registered trademark of DuPont Dow Elastometers. VCR7 is a registered trademark of Crawford Fitting Co. Kalrez7 is a registered trademark of DuPont Dow Elastomers. Neoprene7 is a registered trademark of DuPont. Viton7 is a registered trademark of Dupont Dow Elastometers L.L.C.
ページ6に含まれる内容の要旨
1. UNPACKING THE FMA 1400/1500 MASS FLOW METER AND CONTROLLER 1.1 Inspect Package for External Damage Remove the Packing List and verify that you have received all equipment. If you have any questions about the shipment, please call the Omega7 Customer Service Department at 1-800-622-2378 or (203) 359-1660. Your FMA 1400/1500 Mass Flow Meter/Controller was carefully packed in a stur- dy cardboard carton, with anti-static cushioning materials to withstand shipping shock. Upon receipt, inspect t
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It is also preferable to install the FMA 1400/1500 transducer in a stable environment, free of frequent and sudden temperature changes, high moisture, and drafts. Prior to connecting gas lines inspect all parts of the piping system including fer- rules and fittings for dust or other contaminants. Be sure to observe the direction of gas flow as indicated by the arrow on the front of the meter when connecting the gas system to be monitored. Insert tubing into the compression fittings until the end
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FIGURE 2-1, WIRING DIAGRAM FOR FMA 1400/1500 TRANSDUCERS PIN FUNCTION 1 Chassis Ground 2 Common, Signal Ground For Pin 3 3 0-5 VDC Flow Signal 4 +15 VDC Power Supply 5 (-) 4-20 mA Flow Signal (optional) 6 +7 VDC for Local Set Point 7 (unassigned) 8 TTL Valve Off Control (FMA 1400) 9 Control Set Point Input 0 5 VDC (FMA 1400) 10 Common, Signal Ground for Pin 9 11 Common, Power Supply 12 Valve Test Point/Purge (FMA 1400) 13 (unassigned) 14 -15 VDC Power Supply 15 (+) 4-20 mA Flow Signal (optional)
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Important notes: In general, "D" Connector numbering patterns are standardized. There are, how- ever, some connectors with nonconforming patterns and the numbering sequence on your mating connector may or may not coincide with the numbering sequence shown in our pin configuration table above. It is imperative that you match the appropriate wires in accordance with the correct sequence regardless of the par- ticular numbers displayed on your mating connector. Make sure power is OFF when connectin
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4. SPECIFICATIONS FLOW MEDIUM: Please note that FMA 1400/1500 Mass Flow Meters and Controllers for ranges up to and above 10 L/min are designed to work with clean gases only. Never try to meter or control flow rates of liquids with any FMA 1500's or FMA 1400's. F CALIBRATIONS: Performed at standard conditions [14.7 psia (1.01 bars) and 70 F F (21.1 C)] unless otherwise requested or stated. ENVIRONMENTAL (per IEC 664): Installation Level II; Pollution Degree II 4.1 FMA 1500 Mass Flow Meters for
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Omega7 makes no expressed or implied guarantees of corrosion resistance of mass flow meters as pertains to different flow media reacting with components of meters. It is the customers' sole responsibility to select the model suitable for a particular gas based on the fluid contacting (wetted) materials offered in the different models. INLET AND OUTLET CONNECTIONS: 1/4"compression fittings standard on ranges up to 50 L/min; 3/8” compression fittings standard on 60, 80, and 100 L/min ranges. Opt
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ATTITUDE SENSITIVITY: 1% shift for a 90 degree rotation from horizontal to vertical; standard calibration is in horizontal position. OUTPUT SIGNALS: Linear 0-5 VDC (2000 Ω minimum load impedance); 4-20 mA optional (50-500 Ω loop resistance); 20 mV peak to peak max noise. COMMAND SIGNAL: 0-5 VDC (200K Ω input impedance). TRANSDUCER INPUT POWER: FMA 1400 ranges up to 10 L/min: (15 sLit/min max) +15 +5% VDC, 80 mA max, 1.2 watts max; -15 +5% VDC, 200 mA max; 3 watts max; FMA 1400 ranges above 10
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FLOW RANGES TABLE I FMA 1500/1400 FOR RANGES UP TO 10 L/MIN LOW FLOW MASS FLOW METER/CONTROLLERS* CODE scc/min [N ] CODE std liters/min [N ] 2 2 02 0 to 10 14 0 to 1 04 0 to 20 16 0 to 2 06 0 to 50 18 0 to 5 08 0 to 100 20 0 to 10 10 0 to 200 12 0 to 500 TABLE II FMA 1500/1400 FOR RANGES ABOVE 10 L/MIN MEDIUM FLOW MASS FLOW METER/CONTROLLERS* standard liters/min [N ] CODE 2 23 15 24 20 26 30 27 40 28 50 TABLE III FMA 1500/1400 FOR RANGES ABOVE 10 L/MIN HIGH FLOW MASS FLOW METER/CONTROLLERS* CO
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TABLE IV PRESSURE DROPS MAXIMUM PRESSURE DROP FLOW RATE MODEL [std liters/min] [mm H O] [psid] [mbar] 2 up to 10 25 0.04 2.5 15 63 0.09 6.4 20 300 0.44 30 30 800 1.18 81 40 1480 2.18 150 FMA 1500 50 2200 3.23 223 60 3100 4.56 314 80 4422 6.50 448 100 5500 8.08 557 up to 10 720 1.06 75 15 2630 3.87 266 20 1360 2.00 138 30 2380 3.50 241 FMA 1400 40 3740 5.50 379 50 5440 8.00 551 60 7480 11.00 758 80 10204 15.00 1034 100 12850 18.89 1302 TABLE V APPROXIMATE WEIGHTS MODEL WEIGHT SHIPPING WEIGHT FMA
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During initial powering of the FMA 1400/1500 transducer, the flow output signal will be indicating a higher than usual output. This is indication that the FMA 1400/1500 trans- ducer has not yet attained it's minimum operating temperature. This condition will automatically cancel within a few minutes and the transducer should eventually zero. Caution: If the valve is left in the AUTO (control) or OPEN mode for an extended period of time, it may become warm or even hot to the the touch. Use car
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age is a linear representation of 0 to 100% of the full scale mass flow rate. Response time to set point changes are 1 second (FMA 1400 for ranges up to 10 L/min) and 2 seconds (FMA 1400 for ranges above 10 L/min) to within 2% of the final flow over 25 to 100% of full scale. On pin 6 of the FMA 1400 transducer is a regulated and constant +5VDC output signal. This signal may be used in conjunction with a local set point potentiome- ter for flow setting. FIGURE 5-1, LOCAL SET POINT POTENTIOMETER C
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utilizing +15VDC valve configuration, connecting the TEST pin 12 on 15-pin "D" connectors) to ground will fully open the valve. For FMA 1400's with a +30VDC valve configuration, connecting the TEST pin to +15VDC will fully open the valve. 6. MAINTENANCE 6.1 Introduction It is important that the Mass Flow Meter/Controller is used with clean, filtered gases only. Liquids may not be metered. Since the RTD sensor consists, in part, of a small capillary stainless steel tube, it is prone to occlusion
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6.2.2 FMA 1400/1500 for ranges up to 10 L/min Unscrew the inlet compression fitting of meter. Note that the Restrictor Flow Element (RFE) is connected to the inlet fitting. Carefully disassemble the RFE from the inlet connection. The 50 micron filter screen will now become visible. Push the screen out through the inlet fitting. Clean or replace each of the removed parts as necessary. If alcohol is used for clean- ing, allow time for drying. Inspect the flow path inside the transducer for any vis
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Contact Omega7 for optional sealing materials available. Set the FMA 1400 into PURGE mode, and attempt to flush through with a clean, filtered, and neutral gas such as nitrogen. [Another option for fully opening the valve is to remove the plastic cap on top of the valve, and turn the set screw coun- terclockwise until it stops. See section 7.4 for valve adjustment, to return the valve to functional use.] 7. CALIBRATION PROCEDURES Note: Removal of the factory installed calibration seals and/or an
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FIGURE 7-1, CALIBRATION POTENTIOMETER LOCATIONS 7.2 Calibration of FMA 1500 Mass Flow Meters All adjustments in this section are made from the outside of the meter, there is no need to disassemble any part of the instrument. FMA 1500 Mass Flow Meters may be field recalibrated/checked for the same range they were originally factory calibrated for. When linearity adjustment is needed, or flow range changes are being made proceed to step 7.3. Flow range changes may require a different Restrictor Fl
