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MODEL 452
PROCESS OZONE SENSOR
©Teledyne Instruments
Advanced Pollution Instrumentation Division
(T-API)
9480 Carroll Park Drive
San Diego, CA 92121-5201
TOLL-FREE: 800-324-5190
TEL: 858-657-9800
FAX: 858-657-9816
E-MAIL: api-sales@teledyne.com
WEB SITE: www.teledyne-api.com
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Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev. E SAFETY MESSAGES NOTE The M452 contains no user serviceable parts. CAUTION There is risk of dangerous UV exposure when the cover is removed from the sensor. Take necessary precautions to avoid exposure. CAUTION High voltages exist inside the sensor. Please use caution when sensor cover is removed. i
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Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev. E TABLE OF CONTENTS SAFETY MESSAGES............................................................................ I TABLE OF CONTENTS .................................................................... III LIST OF FIGURES...............................................................................V LIST OF TABLES.................................................................................V WARRANTY POLICY................
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Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev. E 5 SENSOR AND SYSTEM TROUBLESHOOTING ...................... 5-1 5.1 STATUS LED’S............................................................................. 5-1 5.2 STATUS OUTPUTS......................................................................... 5-2 5.3 SENSOR O.K................................................................................. 5-2 5.4 INVALID READING....................................................
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Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev. E LIST OF FIGURES FIGURE 2-1: M452A HIGH PURITY OZONE SENSOR.............................. 2-1 FIGURE 2-2: PRESSURE DROP VS. FLOW (HIGH PURITY VERSION)........ 2-3 FIGURE 4-1: ELECTRICAL CONNECTIONS .............................................. 4-2 FIGURE 4-2: DIGITAL OUTPUT CONNECTIONS....................................... 4-4 LIST OF TABLES TABLE 5-1: STATUS OUTPUTS.................................................
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Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev. E WARRANTY POLICY ADVANCED POLLUTION INSTRUMENTATION DIVISION 02024c Prior to shipment, Teledyne API equipment is thoroughly inspected and tested. Should equipment failure occur, Teledyne API assures its customers that prompt service and support will be available. COVERAGE After the warranty period and throughout the equipment lifetime, Teledyne API stands ready to provide on-site or in-plant service at reasonable rates
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Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev. E THE WARRANTIES SET FORTH IN THIS SECTION AND THE REMEDIES THEREFORE ARE EXCLUSIVE AND IN LIEU OF ANY IMPLIED WARRANTIES OF MERCHANTABILITY, FITNESS FOR PARTICULAR PURPOSE OR OTHER WARRANTY OF QUALITY, WHETHER EXPRESSED OR IMPLIED. THE REMEDIES SET FORTH IN THIS SECTION ARE THE EXCLUSIVE REMEDIES FOR BREACH OF ANY WARRANTY CONTAINED HEREIN. TELEDYNE API SHALL NOT BE LIABLE FOR ANY INCIDENTAL OR CONSEQUENTIAL DAMAGES ARI
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Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev. E 1 Product Descriptions 1.1 M452 Process Ozone Sensor The Teledyne API M452 is a microprocessor-based sensor for measuring the concentration of gaseous ozone in processes such as semiconductor wafer fabrication, water treatment, and ozone research. The M452 can be used as a full flow process sensor or as a sensor to monitor a small flow of gas diverted from a process stream. The M452 features a standard 0-5 volt analog s
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Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev. E INTENTIONALLY BLANK 1-2
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Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev. E 2 Specifications Note: All specifications contained herein are subject to change without notice. Please contact Teledyne API to obtain the current specifications. 2.1 Mechanical Specifications 15 PIN "D" CONNECTOR Model 452A Electrical connections; 1 Analog out − 2 Analog out + 3 Ground 4 +15V in 5 +15V in 6 Digital in #1 7 Digital in #2 6.71 8 Digital out #1 [170.4] 9 Digital out #2 10 Digital out #3 11
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Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev. E 2.2 Performance Specifications Accuracy: ±1% of Full Scale. Repeatability: 1% of Full Scale Response Time: 2 sec. To 95% Zero Drift: 1% Full Scale/month (non –cumulative) 2.3 Operating Limits Measurement Range: 5, 10, 15, 20% w/w 25, 50, 100, 200, 400 g/Nm3 Proof pressure: 115 psia Flow: 0.1-5.0 LPM (See Figure 2-2) Temperature range: 5 to 45 °C Warm-Up Period: 15 minutes 2.4 Electrical Specifications Power Inpu
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Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev. E 2.6 Pressure Drop Figure 2-2 below shows the approximate pressure drop from the inlet fitting to the outlet fitting as a function of volumetric flow rate. Pressure Drop vs. Flow 1.000 2 y = 0.0008x + 0.0048x 0.800 0.600 0.400 0.200 0.000 0 5 10 15 20 25 Flow (LPM) Figure 2-2: Pressure Drop vs. Flow (High Purity Version) 2-3 ∆P (psi)
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Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev. E 2.7 Options The M452 is available with the following options: 2.7.1 AC Power Adapter This option consists of a Universal Input (100-240 VAC, 50-60Hz) Power Adapter with a standard IEC320 modular AC receptacle. A North American standard 3 prong power cord is also provided. 2.7.2 Ozone Destructor (1/4” Tube Fittings) This option consists of an external catalytic Ozone Destructor for connecting to the gas outlet of the M452
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Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev. E 3 Theory of Operation The detection of ozone molecules is based on absorption of 254 nm UV light due to an internal electronic resonance of the O molecule. The 3 Model 452 uses a mercury lamp constructed so that a large majority of the light emitted is at the 254 nm wavelength. Light from the lamp shines through an absorption cell through which the sample gas being measured is passed. The ratio of the intensity of light pa
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Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev. E The intensity of light is converted into a voltage by the detector/preamp module. The voltage is converted into a number by a voltage-to-frequency (V/F) converter capable of 80,000 count resolution. The digitized signal, along with the other variables, is used by the CPU to compute the concentration of ozone using the above formula. 3-2
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Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev. E 4 Installation 4.1 Unpacking Upon receiving the M452 please verify that no apparent shipping damage has occurred. If damage has occurred please advise shipper first, then Teledyne API. 4.2 Mechanical Installation Mount the M452 to a stable platform using four #8-32UNC screws. See Figure 2-1 for mounting hole dimensions. NOTE If the mounting platform is non-conductive or note connected to earth ground, then a separa
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Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev. E Ozone Concentration Power Supply Meter (0-5 VDC) or Data Acqusition Device -+ +15V Common Analog Out - Digital Out #2 Analog Out + Status Display Digital Out #3 or Power Common PLC Digital Out #4 +15 Volt Supply Digital Out Common +15 Volt Supply RS485-A Zero Cal = Closed Digital In #1 RS485-B Digital In #2 Power Common Digital Out #1 Figure 4-1: Electrical Connections 4.3.1 Power Supply The M452 requires a +15 VDC power s
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Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev. E 4.3.2 Analog Output The analog output is a 0-5 volt signal representing the ozone concentration measured by the sensor. The output is scaled to the concentration range that the sensor has been set to measure. Check the serial number label on the M452 to determine the concentration range. For best performance, the analog output should be connected to a voltmeter or A/D converter with a differential input and a minimum input
